We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. 5×10 15 ions / cm2 are implanted in the polished face of LiNbO3 crystals. The single-mode condition, optical power distribution, and bending loss of these kinds of waveguides were. Abstract: Photorefractive optical damage of single beams in LiNbO3 crystals is analyzed within a framework of two photoactive centres (Fe2+/Fe3+ and NbLi4+/NbLi 5+).